Please help fill in the upgrade kits RFQ at our website for suitable configuration for your used semiconductor equipment . Appreciate your time.
The
Upgrade Kits include an advanced Allwin21 AW System Control with touch screen
Graphic User Interface (GUI) and a new PC with Allwin21 real-time control
Software. Most upgrade kits include new main control board, new wafer heating
functions with Allwin21’s Advanced RTP technology, fixed cassette station
instead of the original elevator, and robust 3-Axis integrated robotic wafer
handling (instead of the original). The kits are easy to incorporate
(plug-and-play) into the original systems. Onsite installation available for
most of kits as well (so all facilities connections can stay in place). Each
upgrade kit will enhance the entire systems’ operation and allow for far better
Process Repeatability, Stability, and Uniformity
Real time graphics display,
process data acquisition, and analysis.
Advanced Temperature Control
for RTP and other “lamp-based” wafer heating systems.
Precise parameters profiles
tailored to suit specific process requirements.
Consistent wafer-to-wafer
process cycle repeatability.
Programmable comprehensive
calibration of all subsystems from within the software. This allows faster,
easier calibration, leading to enhanced process results.
Recipe creation. It features
a recipe editor to create and edit recipes to fully automate the processing of
wafers inside the process chamber.
Validation of the recipe so
improper control sequences will be revealed.
Storage of multiple recipes,
process data and calibration files so that process and calibration results can
be maintained and compared over time.
Passwords provide security
for the system, recipe editing, diagnostics, calibration and setup functions
Simple and easy to use menu screen
which allow a process cycle to be easily defined and executed.
Troubleshooting features
which allows engineers and service personnel to activate individual
subassemblies and functions. More I/O, AD/DA “exposure”.
The control board inside the
machine that translates the computer commands to control the machine has a
watchdog timer. If this board looses communication with the control software,
it will shut down all processes and halt the system until communication is
restored.
Closed-loop process parameters
control.
GEM/SECS II function
(Optional).
Advanced Allwin21 EOP
function (Optional)
Low
cost solution of obsolete components and parts.
Increase
stability of the original system.
Add
network function (GEM/SECS II) for Fab/Lab integration
PC
control for data storage.
Friendly
GUI operation.
More
precise control.
Better
performance (Repeatability, Uniformity, Stability)
Easier
maintenance, calibration and troubleshooting.
Upgraded Equipment Models :
Heatpulse 410
Heatpulse 610
Perkin-Elmer 4400
Perkin-Elmer 4410
Perkin-Elmer 4450
Perkin-Elmer 4480
Perkin-Elmer 2400
Matrix 101
Matrix 102
Matrix 103
Matrix 104
Matrix 111
Matrix 10
Matrix 205
Matrix 303
Matrix 403
Tegal 901e
Tegal 903e
Gasonics Aura 1000
Gasonics AE 2001
Gasonics Aura 3010
Gasonics 2000LL
Gasonics L3510
Lam AutoEtch 490
Lam AutoEtch 590
Lam AutoEtch 690
Lam AutoEtch 790
Lam AutoEtch 480
Lam AutoEtch 580
Lam AutoEtch 680
Lam AutoEtch 780
Branson/IPC 3000
Branson/IPC 2000
Branson/IPC 4000Documents on Allwin21 Upgrade Kits for your reference..
- Allwin21 Brochures: Upgrade Kits
- PPT on why upgrade your matrix 105, Matrix 1XX, Matrix 2XX, Matrix 3XX, Matrix 4XX plasma asher etcher descum equipment
- PPT on why upgrade your used Branson/IPC 2000, 3000, 4000 Series plasma asher , plasma etcher equipment
- PPT on why upgrade your used Gasonics Aura 2000LL plasma asher semiconductor equipment
- PPT on why upgrade your used Gasonics Aura 1000 plasma asher semiconductor equipment
- PPT on why upgrade your used Gasonics Aura 3000, Aura 3010, L3510 plasma asher semiconductor equipment
- PPT on why upgrade your used Tegal 901e,Tegal 903e, Tegal 981e, Tegal 983e Plasma etcher equipment
- PPT on why upgrade your used Lam Research Lam Rainbow 4420, 4520, 4620, 4720 plasma etcher/RIE equipment
- PPT on why upgrade your used Lam Research Lam AutoEtch 490, 590, 690,790 plasma etcher equipment
- PPT on Upgrade Kit for Gasonics L3510
- PPT on Upgrade Kit for Gasonics Aura 1000
- PPT on Upgrade Kit for Gasonics Aura 3000 Gasonics Aura 3010
- PPT on Upgrade Kit for Gasonics Aura 2000LL
- PPT on Upgrade Kit for Gasonics AE 2000LL
- PPT on Upgrade Kit for Gasonics AE 2001
- PPT on Upgrade Kit for Tegal 901e Tegal 903e
- PPT on Upgrade Kit for Lam AutoEtch 490, Lam AutoEtch 590, Lam AutoEtch 690, Lam AutoEtch 790
- PPT on Upgrade Kit for Matrix 101,Matrix 102, Matrix 103,Matrix 104,Matrix 105,Matrix 106, Matrix 108,Matrix 205,Matrix 206, Matrix 208, Matrix 303,Matrix 403
- PPT on Upgrade Kits for Branson/IPC 2000, Branson/IPC 3000, Branson/IPC 4000, Barrel Asher, Barrel Etch, Barrel Etcher
- Video on why upgrade your used Tegal 901e,Tegal 903e, Tegal 981e, Tegal 983e Plasma etcher equipment
- Video on Upgrade Kit for Lam AutoEtch 490, Lam AutoEtch 590, Lam AutoEtch 690, Lam AutoEtch 790
- Video on why upgrade your used Lam Research Lam Rainbow 4420, 4520, 4620, 4720 plasma etcher/RIE equipment
- Video on why upgrade your used Matrix 105, Matrix 1XX, Matrix 2XX, Matrix 3XX, Matrix 4XX plasma asher, plasma etcher equipment
- Video on why upgrade your used Branson/IPC 2000, 3000,4000 Series plasma asher equipment
- Video on why upgrade your used Gasonics Aura 1000 plasma asher semiconductor equipment
- Video on why upgrade your used Gasonics Aura 2000LL plasma asher equipment
- Video on why upgrade your used Gasonics Aura 3000, Aura 3010, L3510 plasma asher semiconductor equipment
- Video on why upgrade your used Lam Research Lam Rainbow 4420, 4520, 4620,4720 plasma etcher/RIE equipment
- Documents on our new production proven equipment: RTP, Asher, Etcher, Sputter, Metrology
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